US 12,225,823 B2
Method of fabricating piezoelectric composite
Nam Kuy Cho, Yongin-si (KR); Jin Su Kim, Yongin-si (KR); Jung Ho Ko, Seoul (KR); Man Soon Yoon, Cheongju-si (KR); and Young Min Park, Cheongju-si (KR)
Assigned to NEUROSONA Co., Ltd., Seoul (KR)
Filed by NEUROSONA Co., Ltd., Seoul (KR)
Filed on Nov. 18, 2021, as Appl. No. 17/529,272.
Claims priority of application No. 10-2020-0154993 (KR), filed on Nov. 18, 2020.
Prior Publication US 2022/0158081 A1, May 19, 2022
Int. Cl. H10N 30/092 (2023.01); H10N 30/85 (2023.01)
CPC H10N 30/092 (2023.02) [H10N 30/852 (2023.02)] 6 Claims
OG exemplary drawing
 
1. A method of fabricating a piezoelectric composite, the method comprising:
an electrode plate preparing operation of preparing a first electrode plate;
a support member arranging operation of locating a support member formed with a plurality of through holes on one surface of the first electrode plate; and
a piezoelectric pillar inserting operation of inserting a plurality of piezoelectric pillars having shapes respectively corresponding to the through holes and being previously generated by sintering piezoelectric pellets into the through holes;
a piezoelectric pillar lower surface adhering operation of adhering lower surfaces of the plurality of piezoelectric pillars respectively to the one surface of the first electrode plate by applying a load to upper surfaces of the plurality of piezoelectric pillars respectively;
a support member removing operation of removing the support member;
a piezoelectric pillar upper surface adhering operation of adhering the upper surfaces of the plurality of piezoelectric pillars respectively to one surface of a second electrode plate by applying a load to the other surface of the second electrode plate;
a polymer filling operation of filling the periphery of the plurality of piezoelectric pillars with a polymer;
wherein the piezoelectric pillar lower surface adhering operation and the piezoelectric pillar upper surface adhering operation further include an operation of heating for 30 to 90 minutes at a temperature of 100° C. to 130° C.