US 12,225,808 B2
In-line monitoring of OLED layer thickness and dopant concentration
Yeishin Tung, San Jose, CA (US); Byung Sung Kwak, Portland, OR (US); Robert Jan Visser, Menlo Park, CA (US); Guoheng Zhao, Palo Alto, CA (US); Todd J. Egan, Fremont, CA (US); Dinesh Kabra, Mumbai (IN); and Gangadhar Banappanavar, Durham (GB)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 22, 2023, as Appl. No. 18/395,081.
Application 18/395,081 is a continuation of application No. 17/152,688, filed on Jan. 19, 2021, granted, now 11,856,833.
Claims priority of provisional application 62/964,612, filed on Jan. 22, 2020.
Prior Publication US 2024/0130210 A1, Apr. 18, 2024
Int. Cl. C23C 14/12 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); H10K 71/00 (2023.01); H10K 71/16 (2023.01); H10K 71/70 (2023.01)
CPC H10K 71/00 (2023.02) [C23C 14/12 (2013.01); C23C 14/24 (2013.01); C23C 14/50 (2013.01); C23C 14/54 (2013.01); C23C 14/568 (2013.01); H10K 71/164 (2023.02); H10K 71/70 (2023.02)] 15 Claims
OG exemplary drawing
 
1. A metrology system comprising:
a chamber to hold a workpiece under vacuum conditions, the chamber including a support to hold the workpiece;
a first light source to generate a first light beam that impinges a surface of the workpiece at an oblique angle to induce photoluminescence in a layer on the workpiece in the chamber;
a second light source to generate a second light beam that impinges the surface of the workpiece at a normal angle to be reflected from the layer on the workpiece;
a detector assembly including
optical components to collect on a common optical path both photoluminescent light emitted by the layer substantially normal to the surface and reflected light that is reflected from the workpiece substantially normal to the surface,
a first detector to measure an intensity of the photoluminescent light,
a second detector to measure an intensity of the reflected light, and
a beam splitter on the common optical path to direct at least a portion of the photoluminescent light to the first detector and at least a portion of the reflected light to the second detector; and
a control system configured to
receive the measured intensity of the photoluminescent light,
receive the measured intensity of the reflected light and generate a thickness measurement for the layer therefrom, and
determine a doping concentration of the layer from the thickness measurement and the measured intensity of the photoluminescent light.