CPC H10B 41/44 (2023.02) [H10B 41/10 (2023.02); H10B 41/48 (2023.02)] | 20 Claims |
1. A non-volatile memory device, comprising at least one memory cell, wherein the at least one memory cell comprises:
a substrate;
a stacked structure, disposed on the substrate and comprising a gate dielectric layer, an assist gate, and an insulation layer stacked in order;
a tunneling dielectric layer, disposed on the substrate at one side of the stacked structure;
a floating gate, disposed on the tunneling dielectric layer and comprising an uppermost edge and a curved sidewall;
a control gate structure, covering the curved sidewall of the floating gate; and
an erase gate structure, covering the floating gate and the control gate structure, wherein the uppermost edge of the floating gate is embedded in the erase gate structure, and a portion of the erase gate structure is disposed above the floating gate and the control gate structure.
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