US 12,225,641 B2
Bake devices for handling and uniform baking of substrates
Hiram Cervera, Santa Clara, CA (US); Yongan Xu, Santa Clara, CA (US); and Ludovic Godet, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 11, 2020, as Appl. No. 17/119,377.
Claims priority of provisional application 62/951,909, filed on Dec. 20, 2019.
Prior Publication US 2021/0195695 A1, Jun. 24, 2021
Int. Cl. H05B 3/74 (2006.01); F27D 5/00 (2006.01); H05B 3/28 (2006.01); H05B 3/62 (2006.01)
CPC H05B 3/748 (2013.01) [F27D 5/00 (2013.01); H05B 3/283 (2013.01); H05B 3/62 (2013.01)] 16 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a base;
two or more shafts contacting the base of the apparatus, each shaft of the two or more shafts having extensions disposed thereon, the extensions of each shaft of the two or more shafts operable to support one or more substrates disposed between the two or more shafts, each shaft of the two or more shafts having a first end and a second end;
a lid, the lid including one or more heating elements disposed therein, wherein the lid includes one of:
an actuator operable to move the lid from a raised position to a lowered position, the lid in the lowered position contacts the base to form a process volume between the lid and the base, and the second end of the two or more shafts contact the same base as contacted by the lid; and
an actuated door coupled to the lid, the actuated door operable to move from an open position to a closed position, the actuated door in the closed position contacts the lid to form the process volume between the lid, the two or more shafts, and the base, the lid contacts the base and the two or more shafts.