| CPC H05B 1/0233 (2013.01) [G01K 1/026 (2013.01); G01K 3/005 (2013.01); G01K 3/14 (2013.01); G01R 19/16571 (2013.01); G05D 23/1904 (2013.01); H05B 3/22 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01)] | 25 Claims |

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1. A method of controlling temperature of a heater including a resistive heating element, the method comprising:
applying power to the resistive heating element of the heater at a variable ramp rate to increase a temperature of the heater to a desired temperature setpoint, wherein the variable ramp rate is set to a desired ramp rate;
monitoring an electric current flowing through the resistive heating element of the heater; and
reducing the variable ramp rate from the desired ramp rate to a permitted ramp rate in response to the electric current being greater than a lower limit of an electric current limit band based on a variable reduction factor, wherein an upper limit of the electric current limit band is provided as a system current limit.
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