US 12,225,349 B1
Nonlinear distortion compensation for capacitive MEMS microphones
Limin Zhou, Redmond, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed on Oct. 17, 2022, as Appl. No. 17/967,869.
Claims priority of provisional application 63/292,085, filed on Dec. 21, 2021.
Int. Cl. H04R 19/04 (2006.01)
CPC H04R 19/04 (2013.01) [H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
receiving a signal corresponding to an input sound pressure detected by a capacitive microelectromechanical system (MEMS) microphone, wherein the capacitive MEMS microphone includes an active capacitance and a parasitic capacitance;
determining that a nonlinear relationship exists between the signal and the input sound pressure;
determining, based on the signal, an input parameter associated with the active capacitance and the parasitic capacitance;
determining an output signal based on the input parameter, wherein the output signal and the input sound pressure have a linear relationship;
compensating the signal based on the determined output signal so that the compensated signal has the linear relationship with the input sound pressure; and
outputting the compensated signal as an output corresponding to the input sound pressure.