US 12,224,737 B2
Multimode longitudinally coupled surface acoustic wave resonator with modulated pitch
Tomoya Komatsu, Irvine, CA (US); and Yiliu Wang, Irvine, CA (US)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on May 12, 2022, as Appl. No. 17/743,000.
Claims priority of provisional application 63/218,848, filed on Jul. 6, 2021.
Claims priority of provisional application 63/218,678, filed on Jul. 6, 2021.
Claims priority of provisional application 63/218,682, filed on Jul. 6, 2021.
Prior Publication US 2023/0008248 A1, Jan. 12, 2023
Int. Cl. H03H 9/64 (2006.01); H03H 9/00 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H04B 1/12 (2006.01); H04B 1/40 (2015.01)
CPC H03H 9/6483 (2013.01) [H03H 9/02637 (2013.01); H03H 9/02842 (2013.01); H03H 9/145 (2013.01); H03H 9/14582 (2013.01); H03H 9/25 (2013.01); H04B 1/12 (2013.01); H04B 1/40 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A surface acoustic wave resonator having at least a first resonant frequency and a second resonant frequency, the surface acoustic wave resonator comprising:
an interdigital transducer electrode over a piezoelectric layer, the interdigital transducer electrode including fingers having a first pitch;
a first set of reflectors over the piezoelectric layer, the first set of reflectors including a first number of reflectors having a second pitch, the first pitch being greater than the second pitch; and
a second set of reflectors over the piezoelectric layer, the second set of reflectors including a second number of reflectors having a third pitch, the second number of reflectors being different from the first number of reflectors, the second set of reflectors positioned such that the interdigital transducer electrode is positioned between the first set of reflectors and the second set of reflectors.