CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/025 (2013.01)] | 18 Claims |
1. An acoustic resonator comprising:
a substrate;
a piezoelectric plate having front and back surfaces and having a piezoelectric plate thickness between the front and back surfaces that is greater than or equal to 50 nm and less than or equal to 200 nm;
an acoustic Bragg reflector between the substrate and the back surface of the piezoelectric plate; and
a conductor pattern comprising an interdigital transducer (IDT) on the front surface of the piezoelectric plate,
wherein the IDT comprises interleaved fingers on the piezoelectric plate and at least a portion of the interleaved fingers have a width that is greater than or equal to 0.2 times a pitch of the IDT and less than or equal to 0.3 times the pitch of the IDT.
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