US 12,224,732 B2
Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
Gregory L. Hey-Shipton, Santa Barbara, CA (US); Neal Fenzi, Santa Barbara, CA (US); Mike Eddy, Santa Barbara, CA (US); and Ventsislav Yantchev, Sofia (BG)
Assigned to Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Dec. 21, 2021, as Appl. No. 17/558,090.
Application 17/558,090 is a continuation in part of application No. 16/896,147, filed on Jun. 8, 2020, granted, now 11,264,966.
Application 16/896,147 is a continuation in part of application No. 16/779,306, filed on Jan. 31, 2020, granted, now 11,165,407, issued on Nov. 2, 2021.
Application 16/779,306 is a continuation of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/438,141 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/251,459, filed on Oct. 1, 2021.
Claims priority of provisional application 63/000,006, filed on Mar. 26, 2020.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2022/0116010 A1, Apr. 14, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/025 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An acoustic resonator comprising:
a substrate;
a piezoelectric plate having front and back surfaces and having a piezoelectric plate thickness between the front and back surfaces that is greater than or equal to 50 nm and less than or equal to 200 nm;
an acoustic Bragg reflector between the substrate and the back surface of the piezoelectric plate; and
a conductor pattern comprising an interdigital transducer (IDT) on the front surface of the piezoelectric plate,
wherein the IDT comprises interleaved fingers on the piezoelectric plate and at least a portion of the interleaved fingers have a width that is greater than or equal to 0.2 times a pitch of the IDT and less than or equal to 0.3 times the pitch of the IDT.