US 12,224,557 B2
Semiconductor optical device and method of manufacturing the same
Naoki Fujiwara, Osaka (JP); Akira Furuya, Osaka (JP); and Naoya Kono, Osaka (JP)
Assigned to Sumitomo Electric Industries, Ltd., Osaka (JP)
Filed by SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka (JP)
Filed on Oct. 14, 2021, as Appl. No. 17/501,226.
Claims priority of application No. 2020-180851 (JP), filed on Oct. 28, 2020.
Prior Publication US 2022/0131344 A1, Apr. 28, 2022
Int. Cl. H01S 5/125 (2006.01); H01S 5/10 (2021.01); H01S 5/22 (2006.01)
CPC H01S 5/125 (2013.01) [H01S 5/1028 (2013.01); H01S 5/2206 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A semiconductor optical device in which a light emitting region that emits light and a reflecting region that reflects the light to the light emitting region side are integrated, the semiconductor optical device comprising:
a core layer that is provided in the light emitting region;
a waveguide layer that is provided in the reflecting region, that is optically coupled to the core layer, and that has a band gap that is larger than energy of the light;
a first semiconductor layer of a first conductivity type that is provided below the core layer and the waveguide layer;
a second semiconductor layer of a second conductivity type that is provided on the waveguide layer, the second conductivity type differing from the first conductivity type;
a third semiconductor layer of the first conductivity type that is provided on the second semiconductor layer;
a fourth semiconductor layer of the second conductivity type that is provided on the core layer and above the second semiconductor layer; and
a first thyristor in the reflecting region that overlaps the waveguide layer in a first direction that is a direction that intersects a propagation direction of the light, wherein
the first semiconductor layer and the core layer form a first mesa that protrudes in the first direction,
the first semiconductor layer and the waveguide layer form a second mesa that protrudes in the first direction,
the first mesa and the second mesa extend in the propagation direction of the light and are adjacent to each other,
the first thyristor is formed at a position that overlaps the second mesa in the first direction, and on two sides of the second mesa,
in the reflecting region, the second semiconductor layer and the third semiconductor layer are each provided on the two sides of the second mesa and above the second mesa,
the fourth semiconductor layer is provided on the third semiconductor layer so as to cover an upper side of the second mesa and the two sides of the second mesa, and
the first semiconductor layer, the second semiconductor layer, the third semiconductor layer, and the fourth semiconductor layer form the first thyristor at the position that overlaps the second mesa, and on the two sides of the second mesa.