US 12,224,556 B2
Light emitting device, projector, and display
Manabu Kudo, Suwa (JP); and Katsumi Kishino, Akiruno (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP); and SOPHIA SCHOOL CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP); and SOPHIA SCHOOL CORPORATION, Tokyo (JP)
Filed on Mar. 13, 2022, as Appl. No. 17/693,394.
Claims priority of application No. 2021-041217 (JP), filed on Mar. 15, 2021.
Prior Publication US 2022/0294184 A1, Sep. 15, 2022
Int. Cl. H01S 5/11 (2021.01); G03B 21/20 (2006.01)
CPC H01S 5/11 (2021.01) [G03B 21/2033 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A light emitting device comprising:
a substrate; and
a laminated structure including a plurality of columnar parts, wherein
the columnar part includes
a first semiconductor layer of a first conductivity type,
a second semiconductor layer of a second conductivity type different from the first conductivity type, and
a light emitting layer disposed between the first semiconductor layer and the second semiconductor layer,
the first semiconductor layer is disposed between the substrate and the light emitting layer,
the light emitting layer has a c-plane and a facet plane,
the second semiconductor layer is disposed on the c-plane and the facet plane,
the first semiconductor layer has a first portion and a second portion smaller in diametrical size than the first portion,
the second portion is disposed between the substrate and the first portion, and
the c-plane and the second portion overlap each other, and the c-plane is smaller in diametrical size than the second portion in a plan view from a stacking direction of the first semiconductor layer and the light emitting layer.