US 12,224,549 B2
Line narrowing module, gas laser apparatus, and method for manufacturing electronic devices
Junichi Maekawa, Oyama (JP); and Hiroshi Furusato, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Feb. 10, 2023, as Appl. No. 18/167,611.
Application 18/167,611 is a continuation of application No. PCT/JP2020/033889, filed on Sep. 8, 2020.
Prior Publication US 2023/0187896 A1, Jun. 15, 2023
Int. Cl. H01S 3/137 (2006.01); G03F 7/00 (2006.01); H01S 3/034 (2006.01); H01S 3/08 (2023.01); H01S 3/13 (2006.01); H01S 3/225 (2006.01)
CPC H01S 3/137 (2013.01) [G03F 7/70025 (2013.01); H01S 3/08004 (2013.01); H01S 3/1305 (2013.01); H01S 3/034 (2013.01); H01S 3/225 (2013.01)] 16 Claims
OG exemplary drawing
 
15. A gas laser apparatus comprising a line narrowing module,
the line narrowing module includes
an enclosure,
a prism which is disposed in an internal space of the enclosure and through which light passes,
a mounter which is disposed in the internal space and on which the prism is mounted,
a fixing unit which is disposed in the internal space and fixes the prism to the mounter, and
a light blocking member which is disposed in the internal space and blocks scattered light in the internal space, the scattered light produced from the light and traveling to the fixing unit.