US 12,224,474 B2
Power-efficient microwave plasma jet based on evanescent-mode cavity technology
Abbas Semnani, Toledo, OH (US); and Kazi Sadman Kabir, Toledo, OH (US)
Assigned to The University of Toledo, Toledo, OH (US)
Filed by The University of Toledo, Toledo, OH (US)
Filed on Dec. 6, 2022, as Appl. No. 18/075,523.
Claims priority of provisional application 63/286,710, filed on Dec. 7, 2021.
Prior Publication US 2023/0178868 A1, Jun. 8, 2023
Int. Cl. H01P 1/219 (2006.01); H01P 7/06 (2006.01); H01P 11/00 (2006.01)
CPC H01P 1/219 (2013.01) [H01P 7/06 (2013.01); H01P 11/007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plasma jet assembly comprising:
a cavity resonator;
a metallic material disposed in the cavity resonator;
a radio frequency port configured to receive a radio frequency connector configured to couple electromagnetic energy into the cavity resonator; and
a gas channel within the metallic material and configured to direct a flow of a gas (i) to a space adjacent the metallic material where an electric field concentrates upon the coupling of electromagnetic energy from the radio frequency connector, and (ii) in a direction out of the plasma jet assembly.