US 12,224,388 B2
Component arrangement, package and package arrangement, as well as production method
Oliver Gyenge, Berlin (DE); Rachid Abdallah, Berlin (DE); Simon Maus, Berlin (DE); and Ulli Hansen, Berlin (DE)
Assigned to MSG LITHOGLAS GMBH, Dresden (DE)
Appl. No. 16/967,759
Filed by MSG Lithoglas GmbH, Dresden (DE)
PCT Filed Feb. 11, 2019, PCT No. PCT/DE2019/100130
§ 371(c)(1), (2) Date Sep. 11, 2020,
PCT Pub. No. WO2019/154465, PCT Pub. Date Aug. 15, 2019.
Claims priority of application No. 10 2018 102 961.6 (DE), filed on Feb. 9, 2018.
Prior Publication US 2022/0310890 A1, Sep. 29, 2022
Int. Cl. H01L 33/60 (2010.01); H01L 23/00 (2006.01); H01L 31/02 (2006.01); H01L 31/0203 (2014.01); H01L 31/0232 (2014.01); H01L 33/48 (2010.01); H01L 33/62 (2010.01); H01S 5/02216 (2021.01); H01S 5/02255 (2021.01); H01S 5/02345 (2021.01); H01S 5/0237 (2021.01)
CPC H01L 33/60 (2013.01) [H01L 31/0203 (2013.01); H01L 31/02327 (2013.01); H01L 33/486 (2013.01); H01S 5/02216 (2013.01); H01S 5/02255 (2021.01); H01S 5/02345 (2021.01); H01S 5/0237 (2021.01); H01L 24/32 (2013.01); H01L 24/48 (2013.01); H01L 24/73 (2013.01); H01L 31/02005 (2013.01); H01L 33/62 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/73265 (2013.01); H01L 2933/0058 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A component arrangement, comprising:
a carrier substrate;
a spacer which is arranged on the carrier substrate so as to surround an installation space and has an outlet opening on a side facing away from the carrier substrate;
an optical component arranged in the installation space;
a contact connection which electrically conductively connects the optical component to external contacts arranged outside the installation space;
a cover substrate which is arranged on the spacer and with which the outlet opening is covered in a light-permeable manner; and
a light-reflecting surface which is formed on an anisotropically etched silicon component and is arranged in the installation space as an inclined surface at an angle of approximately 45° relative to a surface of the carrier substrate facing the installation space, in such a way that light radiated in a horizontal direction onto the light-reflecting surface can be radiated out in a vertical direction through the opening and the cover substrate, and vice versa, wherein the spacer is formed from the anisotropically etched silicon component;
wherein the outlet opening has, in plan view, an opening with a trapezoidal shape;
wherein the anisotropically etched silicon component, in a plan view, has a lower opening with a trapezoidal shape and an upper opening with a trapezoidal shape that is limited in one direction of its extent.