US 12,224,362 B2
Substrates having a broadband antireflection layer and methods of forming a broadband antireflection layer
Peng Jiang, Gainesville, FL (US); Zhuxiao Gu, Gainesville, FL (US); and Ruwen Tan, Gainesville, FL (US)
Assigned to University of Florida Research Foundation, INC., Gainesville, FL (US)
Filed by University of Florida Research Foundation, Inc., Gainesville, FL (US)
Filed on May 30, 2023, as Appl. No. 18/203,436.
Application 18/203,436 is a continuation of application No. 16/956,029, granted, now 11,705,527, previously published as PCT/US2018/066234, filed on Dec. 18, 2018.
Claims priority of provisional application 62/608,858, filed on Dec. 21, 2017.
Prior Publication US 2024/0030362 A1, Jan. 25, 2024
Int. Cl. H01L 31/0216 (2014.01); G02B 1/118 (2015.01); H01L 31/18 (2006.01)
CPC H01L 31/02168 (2013.01) [G02B 1/118 (2013.01); H01L 31/186 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A structure comprising:
a base substrate having a polyimide substrate disposed over a first area of the base substrate and second area having a broadband antireflective layer that has a total specular reflection of less than 10% at a wavelength of about 400 to about 800 nm, wherein the broadband antireflective layer has a plurality of pillars that are not uniformly and are randomly spaced apart from one another, wherein the plurality of pillars are non-uniformly sized, wherein the broadband antireflective layer has a height of about 500 nm to about 1000 nm, wherein the plurality of pillars that have a spacing of about 10 nm to 300 nm between a pair of pillars as measured from pillar base to pillar base, and at least one pillar has a diameter at the base of about 50 to 300 nm.