| CPC H01L 29/78675 (2013.01) [H01L 29/66757 (2013.01); H01L 29/78684 (2013.01)] | 20 Claims |

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1. A semiconductor device, comprising:
a first gate structure, disposed over a substrate;
a first semiconductor layer, disposed over the substrate, the first semiconductor layer being overlapped with the first gate structure; and
at least one first conductive element, disposed over the substrate and connected to the first semiconductor layer, a portion of the first semiconductor layer being between the first gate structure and the at least one first conductive element, wherein the at least one first conductive element comprises:
a first poly-material portion; and
a first metallic portion, in physical contact with at least one of an entire top surface and an entire sidewall of the first poly-material portion.
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