US 12,224,301 B2
Back side illumination image sensors and electronic device including the same
Yun Ki Lee, Hwaseong-si (KR); Jong Hoon Park, Hwaseong-si (KR); and Jun Sung Park, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Dec. 28, 2023, as Appl. No. 18/398,981.
Application 18/398,981 is a continuation of application No. 17/409,048, filed on Aug. 23, 2021, granted, now 11,894,409.
Application 17/409,048 is a continuation of application No. 16/775,481, filed on Jan. 29, 2020, granted, now 11,101,314, issued on Aug. 24, 2021.
Application 16/775,481 is a continuation of application No. 16/451,561, filed on Jun. 25, 2019, granted, now 11,121,167, issued on Sep. 14, 2021.
Claims priority of application No. 10-2018-0167379 (KR), filed on Dec. 21, 2018.
Prior Publication US 2024/0128299 A1, Apr. 18, 2024
Int. Cl. H01L 27/146 (2006.01); H10K 59/13 (2023.01)
CPC H01L 27/1464 (2013.01) [H01L 27/1461 (2013.01); H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/14623 (2013.01); H01L 27/1463 (2013.01); H01L 27/14645 (2013.01); H10K 59/13 (2023.02)] 5 Claims
OG exemplary drawing
 
1. An image sensor comprising:
a substrate;
a photodiode in the substrate;
a light shield grid on the photodiode, the light shield grid including an opening above the photodiode;
a first light shielding filter layer formed above the light shield grid, the first light shielding filter layer including an opening corresponding to the opening of the light shield grid; and
a second light shielding filter layer formed above the first light shielding filter, the second light shielding filter layer including an opening corresponding to the opening of the first light shielding filter;
wherein the first light shielding filter layer is spaced apart from the light shield grid; and
wherein the second light shielding filter layer is spaced apart from the first light shielding filter layer.