US 12,224,272 B2
Manufacturing micro-LED displays to reduce subpixel crosstalk
Lisong Xu, San Jose, CA (US); Byung Sung Kwak, Portland, OR (US); Mingwei Zhu, San Jose, CA (US); Hou T. Ng, Campbell, CA (US); Nag B. Patibandla, Pleasanton, CA (US); and Christopher Dennis Bencher, Cupertino, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 22, 2022, as Appl. No. 17/701,599.
Claims priority of provisional application 63/166,193, filed on Mar. 25, 2021.
Prior Publication US 2022/0310872 A1, Sep. 29, 2022
Int. Cl. H01L 25/16 (2023.01); H01L 25/075 (2006.01); H01L 33/00 (2010.01); H01L 33/44 (2010.01); H01L 33/48 (2010.01); H01L 33/54 (2010.01); H01L 33/58 (2010.01); H01L 33/60 (2010.01); H01L 33/32 (2010.01)
CPC H01L 25/167 (2013.01) [H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H01L 33/483 (2013.01); H01L 33/58 (2013.01); H01L 33/60 (2013.01); H01L 33/32 (2013.01); H01L 33/44 (2013.01); H01L 33/54 (2013.01); H01L 2933/0033 (2013.01); H01L 2933/005 (2013.01); H01L 2933/0058 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for manufacturing micro-LED displays, comprising:
depositing a first material over a substrate having a plurality of micro-LEDs that emit light in a first wavelength range such that the plurality of micro-LEDs are covered by the first material and the first material fills gaps laterally separating the micro-LEDs;
removing a portion of the first material from the gaps that laterally separate the plurality of micro-LEDs to form trenches in the first material that extend to or below light-emitting layers of the micro-LEDs;
depositing a second material over the substrate such that the second material covers the first material and extends into the trenches in the first material;
removing a portion of the first and second materials over the plurality of micro-LEDs to form wells over each the plurality of micro-LEDs and such that a plurality of walls of the second material positioned in the gaps between the plurality of micro-LEDs extend vertically higher than a top surface of the first material;
depositing a third material that conformally coats bottoms of the wells and surfaces of the walls of the second material to form isolation walls between the plurality of micro-LEDs, wherein the third material has higher opacity than the second material and has transmittance less than 1% of light in the first wavelength range; and
removing a portion of the third material over the micro-LEDs at the bottoms of the wells.