| CPC H01L 24/05 (2013.01) [H01L 21/76871 (2013.01); H01L 23/481 (2013.01); H01L 24/73 (2013.01); H01L 24/83 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 2224/023 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05025 (2013.01)] | 20 Claims |

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1. A semiconductor chip comprising:
a semiconductor substrate having a first surface and a second surface opposite to the first surface, and an active layer disposed in a portion of the semiconductor substrate that is adjacent to the first surface;
a through electrode extending in the semiconductor substrate in a vertical direction, the through electrode having a lower surface extending partially through the semiconductor substrate and directly connected to the active layer and an upper surface positioned at a level lower than a level of the second surface of the semiconductor substrate;
a passivation layer disposed on the second surface of the semiconductor substrate; and
a bonding pad arranged on a portion of the passivation layer and the upper surface of the through electrode, the bonding pad having a cross-section with a “T” shape in the vertical direction, the bonding pad is connected to the through electrode.
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