US 12,224,236 B2
Semiconductor device and substrate
Hideo Aoki, Yokohama (JP); Hideko Mukaida, Taito (JP); and Satoshi Tsukiyama, Yokohama (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Aug. 30, 2021, as Appl. No. 17/460,468.
Claims priority of application No. 2021-015245 (JP), filed on Feb. 2, 2021.
Prior Publication US 2022/0246516 A1, Aug. 4, 2022
Int. Cl. H01L 23/498 (2006.01); H01L 25/18 (2023.01)
CPC H01L 23/49894 (2013.01) [H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 25/18 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a substrate;
a semiconductor chip provided over the substrate; and
a sealing resin which is provided over the substrate and seals the semiconductor chip,
wherein:
the substrate includes
a wire layer including a wire electrically connected to the semiconductor chip, and
an insulating layer provided in contact with the wire layer and including a glass woven fabric containing a resin,
the glass woven fabric includes a plurality of glass fibers that are provided along two or more directions parallel with the glass woven fabric and are woven,
the glass fibers differ in at least one of a material, a number, and a thickness depending on the directions parallel with the glass woven fabric,
the glass woven fabric includes the glass fibers provided along a first direction and the glass fibers provided along a second direction different from the first direction,
the glass fibers provided along the first direction have a lower coefficient of thermal expansion than the glass fibers provided along the second direction,
a shape of an outer edge of the semiconductor chip as seen in a direction of a normal to a substrate surface of the substrate is substantially rectangular,
the first direction is a direction along long sides of the semiconductor chip,
the second direction is a direction along short sides of the semiconductor chip, and
the resin accounts for a larger part of a cross-sectional area along the short sides than a cross-sectional area along the long sides.