US 12,224,207 B2
Method of processing a workpiece and system for processing a workpiece
Hitoshi Hoshino, Munich (DE); Tzanimir Arguirov, Munich (DE); Yasuyoshi Yubira, Munich (DE); and Karl Heinz Priewasser, Munich (DE)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO Corporation, Tokyo (JP)
Filed on May 28, 2020, as Appl. No. 16/885,526.
Claims priority of application No. 10 2019 207 990.3 (DE), filed on May 31, 2019.
Prior Publication US 2020/0381303 A1, Dec. 3, 2020
Int. Cl. H01L 21/78 (2006.01); H01L 21/268 (2006.01); H01L 21/683 (2006.01); H01L 23/544 (2006.01)
CPC H01L 21/78 (2013.01) [H01L 21/268 (2013.01); H01L 21/6836 (2013.01); H01L 23/544 (2013.01); H01L 2221/68327 (2013.01); H01L 2223/5446 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of processing a workpiece having a first surface, a second surface opposite the first surface, and a third surface extending between the first and second surfaces, the method comprising:
forming modified regions inside the workpiece so as to create openings in the workpiece, the openings extending from the modified regions through non-modified regions of the workpiece to at least one of the first surface, the second surface and the third surface, the modified regions being formed so as to be arranged entirely inside the workpiece, so that the modified regions do not extend to any one of the first surface, the second surface and the third surface;
after forming the modified regions inside the workpiece, introducing a liquid medium into at least some of the openings, wherein the liquid medium is contained by a liquid barrier that surrounds the workpiece; and
after introducing the liquid medium into the at least some of the openings, applying an external stimulus to the liquid medium so as to increase the volume of the medium, wherein the workpiece is divided by the step of applying the external stimulus to the liquid medium, without an additional dividing step, and
wherein:
the workpiece is supported by a sheeting; and
the liquid barrier is provided on an upper surface of the sheeting.