US 12,224,202 B2
Forming an oxide volume within a fin
Cheng-Ying Huang, Portland, OR (US); Gilbert Dewey, Beaverton, OR (US); Jack T. Kavalieros, Portland, OR (US); Aaron Lilak, Beaverton, OR (US); Ehren Mannebach, Beaverton, OR (US); Patrick Morrow, Portland, OR (US); Anh Phan, Beaverton, OR (US); Willy Rachmady, Beaverton, OR (US); and Hui Jae Yoo, Portland, OR (US)
Assigned to Intel Corporation, Santa Clara, CA (US)
Filed by Intel Corporation, Santa Clara, CA (US)
Filed on Jul. 21, 2023, as Appl. No. 18/356,780.
Application 18/356,780 is a division of application No. 16/454,553, filed on Jun. 27, 2019, granted, now 11,764,104.
Prior Publication US 2023/0377947 A1, Nov. 23, 2023
Int. Cl. H01L 21/762 (2006.01); H01L 21/02 (2006.01); H01L 21/225 (2006.01); H01L 21/265 (2006.01); H01L 21/266 (2006.01); H01L 21/311 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01)
CPC H01L 21/76264 (2013.01) [H01L 21/02236 (2013.01); H01L 21/02252 (2013.01); H01L 21/02255 (2013.01); H01L 21/2253 (2013.01); H01L 21/2255 (2013.01); H01L 21/26533 (2013.01); H01L 21/266 (2013.01); H01L 21/31111 (2013.01); H01L 21/76267 (2013.01); H01L 29/0649 (2013.01); H01L 29/7853 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a fin with a first side and a second side opposite the first side, wherein the first side and the second side are substantially parallel to a plane of the fin;
a volume of oxide that extends through the fin from a first area on the first side of the fin to a second area on the second side of the fin, wherein the volume of oxide has at least one of a top surface or a bottom surface that is a non-planar surface between the first side and the second side of the fin, and wherein the volume of oxide has a vertical thickness at a center of the fin less than a vertical thickness at the first side of the fin and at the second side of the fin; and
wherein the volume of oxide includes a selected one or more of: carbon atoms or fluorine atoms.