US 12,224,195 B2
Centering wafer for processing chamber
Muhannad Mustafa, Milpitas, CA (US); and Sanjeev Baluja, Campbell, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 2, 2022, as Appl. No. 17/879,074.
Prior Publication US 2024/0047256 A1, Feb. 8, 2024
Int. Cl. H01L 21/68 (2006.01); B25B 11/00 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68 (2013.01) [B25B 11/005 (2013.01); H01L 21/6833 (2013.01); H01L 21/6838 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A centering wafer comprising:
a disc-shaped body having a top surface and a bottom surface defining a thickness, a center and an outer edge having an outer peripheral face; and
a plurality of arc-shaped slits extending through the thickness of the disc-shaped body, the plurality of arc-shaped slits including a first arc-shaped slit and a second arc-shaped slit, the first arc-shaped slit having a first width defined by an inner edge and an outer edge, the inner edge having an inner face spaced a first distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the outer edge having an outer face spaced a second distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the second distance being greater than the first distance, the first arc-shaped slit having a first length defined by a first end and a second end, the first end having a first end face, the second end having a second end face, each of the first end and second end located at different angular orientations relative to the center of the disc-shaped body, the first arc-shaped slit spaced a first distance from the outer peripheral face, and
the second arc-shaped slit having a second width defined by an inner edge and an outer edge, the inner edge having an inner face spaced a first distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the outer edge having an outer face spaced a second distance from the center of the disc-shaped body and shaped concentric to the disc-shaped body, the second distance being greater than the first distance, the second arc-shaped slit having a second length defined by a first end and a second end, the first end having a first end face, the second end having a second end face, each of the first end and second end located at different angular orientations relative to the center of the disc-shaped body, the second arc-shaped slit spaced a second distance from the outer peripheral face, the second arc-shaped slit centered angularly a distance from the first arc-shaped slit greater than the larger of the first width or second width, the first arc-shaped slit and the second arc-shaped slit on opposite sides of the disc-shaped body, wherein the disc-shaped body does not include any other slits other than the first arc-shaped slit and the second arc-shaped slit.