US 12,224,159 B1
Gas mixing method to enhance plasma
Ta-Hao Kuo, Hsinchu County (TW); Chi-Hung Cheng, Hsinchu County (TW); Yao-Syuan Cheng, Hsinchu County (TW); Kuo-Ju Liu, Hsinchu County (TW); and Ching-Liang Yi, Hsinchu County (TW)
Assigned to SKY TECH INC., Zhubei (TW)
Filed by SKY TECH INC., Hsinchu County (TW)
Filed on Aug. 9, 2023, as Appl. No. 18/231,907.
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32449 (2013.01) [C23C 14/34 (2013.01); C23C 14/345 (2013.01); C23C 14/50 (2013.01); H01J 37/32715 (2013.01); H01J 37/3441 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/332 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A gas mixing method to enhance plasma comprising:
providing a reaction chamber; wherein the reaction chamber includes an accommodating space and the reaction chamber includes a top opening connected to the accommodating space;
providing an adapter plate, and fixing the adapter plate to the reaction chamber to be arranged corresponding to the top opening; wherein the adapter plate further includes a window area communicating both sides of the adapter plate and an air intake channel connecting an outer side surface of the adapter plate and the window area;
providing a target disposed on top of the adapter plate to seal the top opening,
premixing a plasma gas and an auxiliary gas into a gas mixture, and introducing the gas mixture into the accommodating space;
providing a biasing field to the accommodating space wherein disposing a holder plate in the accommodating space, providing a biasing power source electrically connected to the holder plate, and providing a biasing signal to the holder plate with the biasing power source, so as to generate the biasing field;
providing a shielding ring disposed within the accommodating space; wherein the shielding ring is a circular structure and comprises a first side wall, a second side wall and a bottom; the first side wall is a circular wall, facing the adapter plate, and connected to an inner side surface of the adapter plate; the second side wall is the circular wall in parallel to the first side wall, and extends toward the target, and an inner side of the second side wall defines a shielding ring opening; the bottom connects the first side wall and the second side wall; and
providing a cover ring disposed above the shielding ring, wherein the cover ring comprises a horizontal extension portion and a vertical extension portion; the horizontal extension portion is directly or indirectly connected to the adapter plate and extends toward the bottom without contacting the bottom; the inner side of the adapter plate, the shielding ring and the first side wall define an auxiliary intake channel connecting to the air intake channel.