US 12,223,634 B2
Inspection apparatus, measuring method, and computer readable medium for acquiring point cloud data of good quality in performing measurement of a member to be inspected using a three-dimensional sensor
Akira Tsuji, Tokyo (JP)
Assigned to NEC Corporation, Tokyo (JP)
Appl. No. 17/625,884
Filed by NEC Corporation, Tokyo (JP)
PCT Filed Jul. 26, 2019, PCT No. PCT/JP2019/029496
§ 371(c)(1), (2) Date Jun. 29, 2022,
PCT Pub. No. WO2021/019616, PCT Pub. Date Feb. 4, 2021.
Prior Publication US 2022/0358635 A1, Nov. 10, 2022
Int. Cl. G06T 7/00 (2017.01); G01S 17/89 (2020.01)
CPC G06T 7/0004 (2013.01) [G01S 17/89 (2013.01); G06T 2207/10028 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An inspection apparatus comprising:
a three-dimensional sensor configured to irradiate a member to be inspected with a beam and acquire point cloud data of the member to be inspected based on at least amplitude information of light; wherein the inspection apparatus is configured to:
identify a predetermined direction in which there are a largest number of the point cloud data in a reference coordinate system being coordinate axes for the member to be inspected; and
determine a tilt amount for changing an arrangement with respect to the reference coordinate system so that a number of the point cloud data in the predetermined direction increases in an eigen coordinate system being coordinate axes for the three-dimensional sensor.