US 12,223,103 B2
Light scanner having closed-loop control based on optical feedback
Duncan Wesley Strathearn, Waterloo (CA); Kenneth McCoubrey, Kitcherner (CA); Nino Zahirovic, Waterloo (CA); Fan Yang, London (CA); and Niladri Sarkar, Waterloo (CA)
Assigned to AdHawk Microsystems Inc., Waterloo (CA)
Filed by AdHawk Microsystems Inc., Waterloo (CA)
Filed on Jan. 20, 2023, as Appl. No. 18/099,604.
Application 18/099,604 is a continuation in part of application No. 17/874,385, filed on Jul. 27, 2022, granted, now 11,914,768.
Application 17/874,385 is a continuation in part of application No. 17/143,048, filed on Jan. 6, 2021, granted, now 11,435,823, issued on Sep. 6, 2022.
Application 17/143,048 is a continuation in part of application No. 17/087,302, filed on Nov. 2, 2020, granted, now 11,379,035, issued on Jul. 5, 2022.
Application 17/087,302 is a continuation of application No. 15/876,148, filed on Jan. 20, 2018, granted, now 10,824,229, issued on Nov. 3, 2020.
Claims priority of provisional application 62/448,577, filed on Jan. 20, 2017.
Claims priority of provisional application 63/227,160, filed on Jul. 29, 2021.
Prior Publication US 2023/0152888 A1, May 18, 2023
Int. Cl. G06F 3/01 (2006.01); G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 27/00 (2006.01); G02B 27/01 (2006.01)
CPC G06F 3/013 (2013.01) [G02B 26/0833 (2013.01); G02B 26/105 (2013.01); G02B 27/0093 (2013.01); G02B 27/0172 (2013.01); G02B 27/0176 (2013.01); G02B 2027/0178 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A system comprising:
a source module comprising:
a light scanner having a scanning element that is configured to receive a first light signal and steer (1) an interrogation signal in a first two-dimensional pattern over a scan region and (2) an optical-feedback signal in a second two-dimensional pattern over a first region, the interrogation signal including a first portion of the first light signal and the optical-feedback signal including a second portion of the first light signal, wherein the light scanner comprises a micromechanical system (MEMS) device that is a two-axis device having a first axis characterized by a first resonant frequency and a second axis characterized by a second resonant frequency; and
a first package that contains the light scanner, the first package including a lid that is substantially transparent for the first light signal;
a position monitor located in the first region, the position monitor configured to provide a feedback signal based on the optical-feedback signal; and
a processor configured to estimate an instantaneous position of the scanning element based on the feedback signal.