US 12,222,648 B2
Salt, acid generator, resist composition and method for producing resist pattern
Masahiko Shimada, Osaka (JP); and Koji Ichikawa, Osaka (JP)
Assigned to SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo (JP)
Filed by SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo (JP)
Filed on Nov. 8, 2021, as Appl. No. 17/521,141.
Claims priority of application No. 2020-188587 (JP), filed on Nov. 12, 2020.
Prior Publication US 2022/0146931 A1, May 12, 2022
Int. Cl. G03F 7/004 (2006.01); C07C 25/18 (2006.01); C07C 381/12 (2006.01); C07D 307/93 (2006.01); G03F 7/039 (2006.01)
CPC G03F 7/0397 (2013.01) [C07C 25/18 (2013.01); C07C 381/12 (2013.01); C07D 307/93 (2013.01); G03F 7/0045 (2013.01)] 13 Claims
 
1. A salt represented by formula (I):

OG Complex Work Unit Chemistry
wherein, in formula (I),
Q1 and Q2 each independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms,
R11 and R12 each independently represent a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms,
z represents 0,
X1 and X2 each independently represent *—CO—O—, *—O—CO—, *—O—CO—O— or *—O—, and represents a bonding site to C(R11)(R12) or C(Q1)(Q2) or A1 or L2,
L1 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and —CH2— included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—,
A1 represents a group having a lactone structure which may have a substituent,
L2 and L3 each independently represent a single bond or an alkanediyl group having 1 to 6 carbon atoms,
R1 represents an iodine atom or a haloalkyl group having 1 to 12 carbon atoms,
one of R2 represents a halogen atom, and the other of R2 represents a hydroxy group,
m2 is 2, and
Z+ represents an organic cation.