US 12,222,646 B2
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
Jinha Kim, Hwaseong-si (KR); Soonchun Chung, Seoul (KR); Jieun Kim, Suwon-si (KR); and Joonsong Park, Suwon-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 11, 2022, as Appl. No. 17/741,692.
Claims priority of application No. 10-2021-0171197 (KR), filed on Dec. 2, 2021.
Prior Publication US 2023/0176480 A1, Jun. 8, 2023
Int. Cl. G03F 7/038 (2006.01); C07K 14/00 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01)
CPC G03F 7/0387 (2013.01) [C07K 14/001 (2013.01); G03F 7/32 (2013.01); G03F 7/2006 (2013.01)] 6 Claims
 
1. A polypeptide comprising a region A, a region B, and a region H;
wherein:
the region A has an alanine content of 20% or more, and includes at least one first repeat unit having 4 to 6 consecutive amino acid residues, wherein the first repeat unit is represented by Formula 1:
X11-(Ala-X12)n11—X13;  Formula 1
wherein X11 and X12 are each independently Gly or Ala,
X13 is Ser, and
n11 is 1 or 2;
the region B has a tyrosine content of 10% or more, a content of 5% or more of at least one of serine, threonine, asparagine, or glutamine, and includes at least one second repeat unit including 4 to 8 consecutive amino acid residues, wherein the second repeat unit is represented by Formula 2:
X21—(X22—X23)n21—(X24—X25)n22-Tyr;  Formula 2
wherein X21 and X23 are each Gly,
X22 and X24 are each independently Ala or Val,
X25 is Ser, Thr, Asn, or Gln,
n21 is an integer of 0 to 2, and
n22 is 1; and
the region H comprises Gly-Ala-Ala-Ser (SEQ ID NO: 8);
wherein the polypeptide has a molecular weight of 10,000 g/mol or less.