US 12,222,590 B2
Lithium niobate waveguide having weak phase drift
Hanxiao Liang, Shanghai (CN); Yipin Song, Shanghai (CN); Yingcong Zhou, Shanghai (CN); Haicang Wu, Shanghai (CN); Wenhao Mao, Shanghai (CN); Shiwei Song, Shanghai (CN); Weiqi Sun, Shanghai (CN); and Qingyang Yu, Shanghai (CN)
Appl. No. 17/638,819
Filed by SHANGHAI LYCORE TECHNOLOGIES Co., Ltd., Shanghai (CN)
PCT Filed May 14, 2021, PCT No. PCT/CN2021/093946
§ 371(c)(1), (2) Date Feb. 26, 2022,
PCT Pub. No. WO2021/228254, PCT Pub. Date Nov. 18, 2021.
Claims priority of application No. 202010410353.4 (CN), filed on May 14, 2020.
Prior Publication US 2022/0308371 A1, Sep. 29, 2022
Int. Cl. G02F 1/035 (2006.01)
CPC G02F 1/035 (2013.01) [G02F 2201/063 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A lithium niobate waveguide having weak phase drift, comprising:
a lithium niobate layer,
a metal electrode, and
a substrate layer,
wherein the lithium niobate layer comprises a lithium niobate central ridge and lithium niobate extension surfaces extending towards two sides of the lithium niobate central ridge,
wherein a metal oxide layer is disposed on an upper surface of the lithium niobate central ridge, and
wherein the substrate layer is located on a lower surface of the lithium niobate layer,
wherein a thickness of the lithium niobate central ridge ranges from 0.2 to 3 μm, a thickness of each lithium niobate extension surface ranges from 0.1 to 1 μm, and a width of the lithium niobate central ridge ranges from 0.3 to 3 μm,
wherein the metal oxide layer is disposed on upper surfaces of the lithium niobate extension surfaces and a side surface of the central ridge,
wherein the metal electrode passes through partial or all of the metal oxide layers, and/or partial or all of the lithium niobate extension surfaces, and/or partial or all of the lower substrate layer to be connected to a surface of a lowermost layer that is passed through.