US 12,222,537 B2
Surface relief waveguides with high refractive index resist
Matthew C Traub, Sterrebeek (BE); Yingnan Liu, Sunnyvale, CA (US); Vikramjit Singh, Pflugerville, TX (US); Frank Y. Xu, Austin, TX (US); Robert D. Tekolste, Boulder, CO (US); Qizhen Xue, Austin, TX (US); Samarth Bhargava, Saratoga, CA (US); Victor Kai Liu, Mountain View, CA (US); Brandon Michael-James Born, Sunnyvale, CA (US); and Kevin Messer, Mountain View, CA (US)
Assigned to Magic Leap, Inc., Plantation, FL (US)
Appl. No. 18/729,437
Filed by Magic Leap, Inc., Plantation, FL (US)
PCT Filed Jan. 20, 2023, PCT No. PCT/US2023/061015
§ 371(c)(1), (2) Date Jul. 16, 2024,
PCT Pub. No. WO2023/141583, PCT Pub. Date Jul. 27, 2023.
Claims priority of provisional application 63/301,318, filed on Jan. 20, 2022.
Prior Publication US 2024/0418928 A1, Dec. 19, 2024
Int. Cl. F21V 8/00 (2006.01); G03F 7/00 (2006.01)
CPC G02B 6/0065 (2013.01) [G02B 6/0016 (2013.01); G03F 7/0002 (2013.01); G03F 7/0007 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A system for manufacturing an optical device, the system comprising:
a reservoir configured to store resist;
a fluid dispenser that includes an dispensing mechanism configured to dispense drops of the resist onto a substrate;
a meniscus pump configured to cause movement of the resist from the reservoir to the fluid dispenser through a first channel;
a fluid pump configured to cause movement of undispensed resist from the fluid dispenser to the reservoir through a second channel;
a fluid control device that is communicatively coupled to the fluid pump and the meniscus pump, the fluid control device configured to control the operation of the fluid pump and the meniscus pump to maintain a continuous flow of the resist between the reservoir and the fluid dispenser; and
an imprint mechanism that operates to create the optical device by applying an imprint template to the resist that has been dispensed onto the substrate, wherein applying the imprint template creates a pattern of one or more structures in the resist, wherein the pattern corresponds to the imprint template.
 
9. A method for manufacturing an optical device, the method comprising:
operating a fluid dispenser that includes an dispensing mechanism to dispense drops of resist onto a substrate;
operating a meniscus pump to cause movement of the resist from a reservoir to the fluid dispenser through a first channel;
operating a fluid pump to cause movement of undispensed resist from the fluid dispenser to the reservoir through a second channel, wherein the fluid pump and the meniscus pump operate to maintain a continuous flow of the resist between the reservoir and the fluid dispenser; and
operating an imprint mechanism to create the optical device by applying an imprint template to the resist that has been dispensed onto the substrate, wherein applying the imprint template creates a pattern of one or more structures in the resist, and the pattern corresponds to the imprint template.