| CPC G02B 5/26 (2013.01) [H01L 27/1462 (2013.01)] | 12 Claims |

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1. A wavelength selective filter, comprising:
a concavo-convex structure layer having a concavo-convex structure on a surface, the concavo-convex structure being composed of a plurality of concavo-convex elements arranged having a subwavelength period, the concavo-convex elements including protrusions and recesses;
a high refractive index layer located on the concavo-convex structure and having a surface shape following the concavo-convex structure, the high refractive index layer including a first grating high refractive index region located on a bottom of the concavo-convex structure to form a subwavelength grating, and a second grating high refractive index region located on a top of the concavo-convex structure to form a subwavelength grating; and
a low refractive index layer located on the high refractive index layer and having a surface shape following a concavo-convex structure on a surface of the high refractive index layer, wherein
the high refractive index layer has a refractive index higher than both of refractive indices of the concavo-convex structure layer and the low refractive index layer,
the concavo-convex structure layer, the high refractive index layer, and the low refractive index layer are made of a material transparent to light in a visible region,
the concavo-convex structure layer includes a UV-curable resin, a heat-curable resin, or a thermoplastic resin, and
the low refractive index layer includes an inorganic compound.
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