US 12,222,492 B2
Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes
Nicolo' Boni, Albino (IT); Roberto Carminati, Piancogno (IT); and Massimiliano Merli, Pavia (IT)
Assigned to STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed by STMicroelectronics S.r.l., Agrate Brianza (IT)
Filed on Sep. 28, 2021, as Appl. No. 17/487,166.
Claims priority of application No. 102020000022978 (IT), filed on Sep. 29, 2020.
Prior Publication US 2022/0099960 A1, Mar. 31, 2022
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01)
CPC G02B 26/0858 (2013.01) [B81B 3/0062 (2013.01); B81B 2201/042 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical device, comprising:
a fixed structure having a frame defining a cavity;
a tiltable structure elastically suspended above the cavity and having a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis orthogonal to the first horizontal axis;
a piezoelectrically driven actuation structure configured to be biased to cause a desired rotation of the tiltable structure about a first rotation axis and a second rotation axis in said horizontal plane;
a supporting structure integral with the fixed structure and extending into the cavity starting from the frame; and
lever elements elastically coupled to the tiltable structure at a first end by respective elastic suspension elements and coupled to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis;
wherein the lever elements are elastically coupled to the piezoelectrically driven actuation structure so that biasing of said piezoelectrically driven actuation structure causes, as a result of rotation of said lever elements about the lever rotation axis, the desired rotation of the tiltable structure about the first rotation axis and the second rotation axis, wherein said first and second rotation axes are inclined at 45° with respect to said first and second horizontal axes.