US 12,222,490 B2
Metrology system, and apparatus including primary mirror
Yuto Owaki, Tokyo (JP); Atsushi Kato, Tokyo (JP); Noboru Kawaguchi, Tokyo (JP); and Satoru Sofuku, Tokyo (JP)
Assigned to MITSUBISHI ELECTRIC CORPORATION, Tokyo (JP)
Appl. No. 18/281,568
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
PCT Filed Mar. 22, 2022, PCT No. PCT/JP2022/013222
§ 371(c)(1), (2) Date Sep. 12, 2023,
PCT Pub. No. WO2022/202823, PCT Pub. Date Sep. 29, 2022.
Claims priority of application No. 2021-048500 (JP), filed on Mar. 23, 2021.
Prior Publication US 2024/0192478 A1, Jun. 13, 2024
Int. Cl. G02B 23/00 (2006.01); G02B 7/182 (2021.01); G02B 23/02 (2006.01); G02B 23/16 (2006.01)
CPC G02B 23/02 (2013.01) [G02B 7/1821 (2013.01); G02B 23/16 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A metrology system for measuring an amount of displacement of a structure of an apparatus including a primary mirror, the apparatus including the primary mirror including a primary mirror portion including the primary mirror and a primary mirror supporting portion to support the primary mirror, an elevation axis structural body to support the primary mirror portion, and being rotatable around an elevation axis that allows an elevation angle in an orientation direction in which the primary mirror is oriented to be changed, an azimuth mount to support the elevation axis structural body rotatably around the elevation axis, and being rotatable around an azimuth axis that allows an azimuth angle in the orientation direction to be changed, and a pedestal portion to support the azimuth mount rotatably around the azimuth axis, the metrology system comprising:
an elevation axis base portion provided along the elevation axis, passing through a position where the elevation axis and the azimuth axis intersect, and being fixed to the azimuth mount; and
an inclinometer disposed at a position of the elevation axis base portion through which the azimuth axis passes, and to measure an inclination angle of the elevation axis base portion.