US 12,222,448 B1
LIDAR sensor system including integrated modulator
Ashish Bhardwaj, Fremont, CA (US); Sen Lin, Mountain View, CA (US); Dong Liu, San Jose, CA (US); Xue Liu, San Jose, CA (US); and Andrew Steil Michaels, Los Altos, CA (US)
Assigned to AURORA OPERATIONS, INC., Pittsburgh, PA (US)
Filed by Aurora Operations, Inc., Pittsburgh, PA (US)
Filed on Nov. 21, 2023, as Appl. No. 18/516,671.
Int. Cl. G01S 7/481 (2006.01); G01S 17/931 (2020.01); H01L 31/0352 (2006.01)
CPC G01S 7/4816 (2013.01) [G01S 17/931 (2020.01); H01L 31/035236 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A light detection and ranging (LIDAR) sensor system for a vehicle, the LIDAR sensor system comprising:
a light source configured to output a beam;
a photonics integrated circuit (PIC) comprising a semiconductor die, the semiconductor die comprising a substrate having two or more semiconductor stacks respectively associated with two or more different semiconductor devices formed on the substrate, the two or more different semiconductor devices respectively configured to receive the beam from the light source and modify one or more features of the beam,
wherein a first semiconductor device of the two or more different semiconductor devices comprises a first plurality of layers including the substrate, wherein a second semiconductor device of the two or more different semiconductor devices comprises a second plurality of layers including the substrate, wherein a second arrangement of the second plurality of layers differs from a first arrangement of the first plurality of layers, and wherein the first arrangement of the first plurality of layers and the second arrangement of the second plurality of layers are formed by parallel regrowth on the substrate;
a transmitter configured to receive the beam from the semiconductor die; and
one or more optics configured to receive the beam from the transmitter and emit the beam towards an object.