US 12,222,409 B2
Inspection apparatus and method for inspecting magnetic sensor
Kazuya Watanabe, Tokyo (JP); and Hiraku Hirabayashi, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Nov. 7, 2022, as Appl. No. 17/981,838.
Claims priority of application No. 2021-185095 (JP), filed on Nov. 12, 2021.
Prior Publication US 2023/0152396 A1, May 18, 2023
Int. Cl. G01R 33/00 (2006.01); G01B 7/14 (2006.01); G01B 7/30 (2006.01); G01R 15/20 (2006.01); G01R 19/00 (2006.01); G01R 33/09 (2006.01)
CPC G01R 33/09 (2013.01) 14 Claims
OG exemplary drawing
 
1. An inspection apparatus configured to apply a magnetic field to a magnetic sensor to inspect an output of the magnetic sensor,
the inspection apparatus comprising:
a stage having a placing surface for the magnetic sensor to be placed on; and
a first magnetic field generator and a second magnetic field generator each disposed at a predetermined distance from the placing surface in a direction perpendicular to the placing surface, wherein
the first magnetic field generator is configured to be changeable in orientation and to singly generate a first magnetic field that is a magnetic field to be applied to the magnetic sensor and that is in a first direction oblique to the direction perpendicular to the placing surface, and configured to be rotatable in a direction about an axis of the first magnetic field generator oblique to the direction perpendicular to the placing surface,
the second magnetic field generator is configured to be changeable in orientation and to singly generate a second magnetic field that is a magnetic field to be applied to the magnetic sensor and that is in a second direction oblique to the direction perpendicular to the placing surface, and configured to be rotatable in a direction about an axis of the second magnetic field generator oblique to the direction perpendicular to the placing surface, and
the first and second magnetic field generators are configured to cooperatively generate a composite magnetic field that is a magnetic field to be applied to the magnetic sensor and contains a component in a direction parallel to an imaginary plane perpendicular to the placing surface.