US 12,222,386 B2
Method of generating device model and computing device performing the same
Gwangnae Gil, Yongin-si (KR); Seyoung Park, Hwaseong-si (KR); Sola Woo, Gwacheon-si (KR); and Jonghyun Lee, Daegu (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Aug. 30, 2022, as Appl. No. 17/899,101.
Claims priority of application No. 10-2021-0181283 (KR), filed on Dec. 17, 2021; and application No. 10-2022-0013195 (KR), filed on Jan. 28, 2022.
Prior Publication US 2023/0194594 A1, Jun. 22, 2023
Int. Cl. G01R 31/28 (2006.01); G05B 13/02 (2006.01)
CPC G01R 31/2851 (2013.01) [G05B 13/0265 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of generating a device model configured to perform a simulation based on device data and output simulation result data indicating characteristics of a semiconductor device, the method being performed by at least one processor executing program codes, the method comprising:
receiving measurement data obtained by measuring the characteristics of the semiconductor device;
selecting at least one target parameter from a plurality of parameters of the device model configured to perform the simulation;
selecting a plurality of initial value sets corresponding to different combinations of initial values of the at least one target parameter;
determining a plurality of local minimum values based on reinforcement learning such that each of the plurality of local minimum values corresponds to a minimum value of a difference between the measurement data and the simulation result data with respect to each of the plurality of initial value sets; and
determining improved values of the at least one target parameter based on the plurality of local minimum values.