| CPC G01R 31/2851 (2013.01) [G05B 13/0265 (2013.01)] | 20 Claims |

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1. A method of generating a device model configured to perform a simulation based on device data and output simulation result data indicating characteristics of a semiconductor device, the method being performed by at least one processor executing program codes, the method comprising:
receiving measurement data obtained by measuring the characteristics of the semiconductor device;
selecting at least one target parameter from a plurality of parameters of the device model configured to perform the simulation;
selecting a plurality of initial value sets corresponding to different combinations of initial values of the at least one target parameter;
determining a plurality of local minimum values based on reinforcement learning such that each of the plurality of local minimum values corresponds to a minimum value of a difference between the measurement data and the simulation result data with respect to each of the plurality of initial value sets; and
determining improved values of the at least one target parameter based on the plurality of local minimum values.
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