US 12,222,372 B2
Chip type coil-based fluxgate current sensor
Xiaowei Hou, Ningbo (CN); Yang Lv, Ningbo (CN); Liangguang Zheng, Ningbo (CN); Shengping Zhu, Ningbo (CN); Po Zhang, Ningbo (CN); and Peng Wu, Ningbo (CN)
Assigned to NINGBO CRRC TIMES TRANSDUCER TECHNOLOGY CO., LTD., Ningbo (CN)
Appl. No. 18/005,528
Filed by NINGBO CRRC TIMES TRANSDUCER TECHNOLOGY CO., LTD., Ningbo (CN)
PCT Filed Sep. 11, 2020, PCT No. PCT/CN2020/114833
§ 371(c)(1), (2) Date Jan. 13, 2023,
PCT Pub. No. WO2022/036776, PCT Pub. Date Feb. 24, 2022.
Claims priority of application No. 202010833286.7 (CN), filed on Aug. 18, 2020.
Prior Publication US 2023/0280376 A1, Sep. 7, 2023
Int. Cl. G01R 15/20 (2006.01)
CPC G01R 15/20 (2013.01) 7 Claims
OG exemplary drawing
 
1. A chip type coil-based fluxgate current sensor, comprising a magnetism gathering iron core, a chip type coil, an integral filtering module, a signal driving module, a voltage acquisition module, and a signal amplification module which are connected in sequence;
the chip type coil comprises a first high-resistance silicon wafer and a second high-resistance silicon wafer which are bonded with each other; a built-in cavity is formed between involution surfaces of the first high-resistance silicon wafer and the second high-resistance silicon wafer, and multiple solenoid cavities filled with coil materials are provided around a periphery of the cavity; a cavity opening is formed at one end after involution of the first high-resistance silicon wafer and the second high-resistance silicon wafer;
the magnetism gathering iron core is inserted into the cavity of the chip type coil by means of the cavity opening;
further comprising a feedback coil and a self-excited oscillation circuit module; the feedback coil is used for generating a magnetic field opposite to a magnetic field generated by a primary-side current, and feeding the generated magnetic field back to the magnetism gathering iron core; the self-excited oscillation circuit module is used for detecting a current of the chip type coil, reversing square waves of the chip type coil, and driving the chip type coil;
the integral filtering module is used for receiving a voltage signal output after the chip type coil senses a detected magnetic field, and processing the voltage signal to obtain a corresponding current signal.