US 12,222,370 B2
Probe head and probe card having same
Bum Mo Ahn, Gyeonggi-do (KR); Seung Ho Park, Gyeonggi-do (KR); and Sung Hyun Byun, Gyeonggi-do (KR)
Assigned to POINT ENGINEERING CO., LTD., Chungcheongnam-do (KR)
Appl. No. 17/919,739
Filed by POINT ENGINEERING CO., LTD., Chungcheongnam-do (KR)
PCT Filed Apr. 20, 2021, PCT No. PCT/KR2021/004942
§ 371(c)(1), (2) Date Oct. 18, 2022,
PCT Pub. No. WO2021/215790, PCT Pub. Date Oct. 28, 2021.
Claims priority of application No. 10-2020-0048660 (KR), filed on Apr. 22, 2020.
Prior Publication US 2023/0143340 A1, May 11, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 1/067 (2006.01)
CPC G01R 1/07371 (2013.01) [G01R 1/06755 (2013.01); G01R 1/07342 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A probe head of a probe card, the probe head comprising:
a plurality of guide plates each having a guide hole,
wherein at least one of the guide plates has a shape in which a plurality of guide layers are stacked, and
at least one of the guide plates comprises:
a first guide layer provided at a lowermost side thereof, and having a first guide hole; and
a second guide layer provided at an uppermost side thereof, and having a second guide hole,
wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on a same vertical line,
wherein the first guide layer and the second guide layer are made of an anodic aluminum oxide film formed by anodizing a metal as a base material and removing the base material,
wherein the plurality of the guide plates comprises: a lower guide plate having a lower guide hole; and an upper guide plate provided above the lower guide plate, and having an upper guide hole,
wherein one of the upper guide plate and the lower guide plate includes the first guide layer and the second guide layer, and
wherein the upper guide hole and the lower guide hole have a symmetrical structure.