US 12,222,369 B2
MEMS probe card
Liangyu Zhao, Suzhou (CN); and Ailin Wang, Suzhou (CN)
Assigned to MAXONE SEMICONDUCTOR CO., LTD., Suzhou (CN)
Appl. No. 18/021,244
Filed by MAXONE SEMICONDUCTOR CO., LTD., Jiangsu (CN)
PCT Filed Jul. 27, 2021, PCT No. PCT/CN2021/108720
§ 371(c)(1), (2) Date Feb. 14, 2023,
PCT Pub. No. WO2022/033300, PCT Pub. Date Feb. 17, 2022.
Claims priority of application No. 202010816387.3 (CN), filed on Aug. 14, 2020.
Prior Publication US 2023/0324437 A1, Oct. 12, 2023
Int. Cl. G01R 31/20 (2006.01); G01R 1/073 (2006.01)
CPC G01R 1/07342 (2013.01) 1 Claim
OG exemplary drawing
 
1. A MEMS probe card comprises a stiffener (1), a PCB board (2), an adapter layer (3), a guide plate (4) and a MEMS probe (5) from top to bottom; the stiffener (1) is used to increase the strength of MEMS probe card; the PCB board (2) is used to connect a testing machine and signal line; the adapter layer (3) is a medium between a PCB board and the MEMS probe for realizing a fixed adaptation of signals; the guide plate (4) is used to accommodate the MEMS probe (5); and the MEMS probe (5) is used to connect a tested wafer to realize testing of electrical properties of the tested wafer;
wherein:
the guide plate (4) and the MEMS probe (5) jointly constitute a guide plate-MEMS probe structure, and the guide plate-MEMS probe structure is made from a guide plate-MEMS probe structure template; the guide plate-MEMS probe structure template can be dissolved in the solution where the guide plate (4) and the MEMS probe (5) cannot be dissolved, and the guide plate-MEMS probe structure template is provided with a marker position, and the guide plate (4) is provided with a coating convex;
the guide plate-MEMS probe structure template are made by a guide board-MEMS probe structure template etching equipment, and the guide plate-MEMS probe structure template etching equipment is successively provided with a light source (7-1), a pinhole (7-2), a collimating lens (7-3), an x-direction slit expansion plate (7-4), a y-direction slit expansion plate (7-5), a first prism (7-6), a plane mirror (7-7), a second prism (7-8), a first image sensor (7-9), a controller (7-10), and a laser array (7-11) along a direction of light propagation; and
the light beam emitted by the light source (7-1) passes through pinhole (7-2) to form a point light source, and the pinhole (7-2) is located at the focus of the collimating lens (7-3); the point light source passes through the collimating lens (7-3) to form parallel light, and the parallel light passes through the x-direction slit expansion plate (7-4) to form an x-direction stripe array, and the x-direction stripe array passes through the y-direction slit expansion plate (7-5) to form a point array, and the point array is transmitted through the first prism (7-6), reflected by the plane mirror (7-7), reflected by the first prism (7-6), transmitted by the second prism (7-8), and incident to the first image sensor (7-9) respectively; the first image sensor (7-9) is electrically connected with the controller (7-10) and the controller (7-10) controls the laser array (7-11) to send out a laser beam, and the laser beam is reflected by the second prism (7-8) and the first prism (7-6) respectively and incident to the guide plate-MEMS probe structure template (6) without the plane mirror (7-7).