US 12,222,328 B2
Testing apparatus and testing method
Makoto Kobayashi, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jun. 24, 2022, as Appl. No. 17/808,626.
Claims priority of application No. 2021-114179 (JP), filed on Jul. 9, 2021.
Prior Publication US 2023/0010092 A1, Jan. 12, 2023
Int. Cl. G01N 3/08 (2006.01); G01N 3/06 (2006.01)
CPC G01N 3/08 (2013.01) [G01N 3/06 (2013.01); G01N 2203/0019 (2013.01); G01N 2203/0078 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A testing apparatus comprising:
a support unit that supports a lower surface side of a test piece;
a pressing unit having an indenter that presses the test piece supported by the support unit;
a drive mechanism that raises and lowers the pressing unit;
a load measurement instrument that measures a load generated when the indenter presses the test piece supported by the support unit; and
a controller that controls raising and lowering of the pressing unit,
wherein the controller is configured to be capable of stopping movement of the indenter when both a measurement value of the load measurement instrument has turned from a rise to a fall after the indenter has started pressing of the test piece and a subsequent measurement value of the load measurement instrument, after the change from the rise to the fall, shows a reduction in the load that is greater than a predetermined value.