US 12,222,316 B2
Semiconductor device providing a biosensor to test for pathogen
Samuel J. Anderson, Tempe, AZ (US); and Hugh J. Griffin, Belfast (GB)
Assigned to IceMos Technology Limited, (GB)
Filed by IceMos Technology Limited, Belfast (GB)
Filed on Feb. 9, 2021, as Appl. No. 17/171,691.
Application 17/171,691 is a continuation in part of application No. 17/158,609, filed on Jan. 26, 2021, abandoned.
Prior Publication US 2022/0236214 A1, Jul. 28, 2022
Int. Cl. G01N 27/414 (2006.01); G01N 27/327 (2006.01); G01N 33/539 (2006.01)
CPC G01N 27/4145 (2013.01) [G01N 27/3272 (2013.01); G01N 27/4146 (2013.01); G01N 33/539 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A method of making a semiconductor device, comprising:
providing a substrate;
forming a buried oxide layer over the substrate;
forming a device layer over the buried oxide layer
forming a cavity through the substrate while leaving the buried oxide layer disposed over the cavity, wherein a portion of the device layer and buried oxide layer disposed over the cavity forms a membrane;
forming a plurality of openings through the membrane and extending to the cavity;
depositing aluminum oxide over a sidewall of the openings through the membrane and further over the buried oxide layer within the cavity; and
forming a backside contact over a surface of the substrate opposite the device layer, wherein the backside contact includes a port extending into the cavity adapted to introduce a reactive solution into the cavity.