US 12,222,308 B2
Methods for making electrodes and providing electrical connections in sensors
Shrisudersan Jayaraman, Horseheads, NY (US); and Navaneetha Krishnan Subbaiyan, Portland, OR (US)
Assigned to CORNING INCORPORATED, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Nov. 21, 2023, as Appl. No. 18/515,508.
Application 18/515,508 is a division of application No. 16/959,236, granted, now 11,846,597, previously published as PCT/US2018/067812, filed on Dec. 28, 2018.
Claims priority of provisional application 62/613,275, filed on Jan. 3, 2018.
Prior Publication US 2024/0085361 A1, Mar. 14, 2024
Int. Cl. G01N 27/28 (2006.01); C03C 17/06 (2006.01); C03C 17/10 (2006.01); G01N 27/36 (2006.01); H01L 23/498 (2006.01)
CPC G01N 27/283 (2013.01) [C03C 17/06 (2013.01); C03C 17/10 (2013.01); G01N 27/36 (2013.01); H01L 23/49827 (2013.01); C03C 2218/34 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A glass electrochemical sensor, comprising:
a glass sensor body comprising a plurality of through glass vias (TGVs), wherein outer contact apertures of two or more glass sensor components forming the glass sensor body are configured to be aligned when empty to form two or more of the plurality of TGVs, a plurality of outer contact TGVs of the glass sensor body comprising the outer contact apertures at least partially filled with a conducting material; and
at least two electrodes disposed within a continuous cavity formed by the two or more glass sensor components, the cavity disposed within the glass sensor body, each of the at least two electrodes disposed on a surface of the glass sensor body adjacent to at least a different one of the plurality of outer contact TGVs;
wherein the plurality of TGVs further comprises an access hole in the glass sensor body configured to allow access to the at least two electrodes via the cavity; and
wherein the at least two electrodes are disposed on the surface of the glass sensor body by bottom up plating.