US 12,222,301 B2
X-ray inspection apparatus
Ken Iwakawa, Ritto (JP); Akihiro Maenaka, Ritto (JP); and Futoshi Yurugi, Ritto (JP)
Assigned to ISHIDA CO., LTD., Kyoto (JP)
Filed by ISHIDA CO., LTD., Kyoto (JP)
Filed on Jan. 26, 2023, as Appl. No. 18/160,139.
Claims priority of application No. 2022-015119 (JP), filed on Feb. 2, 2022.
Prior Publication US 2023/0258581 A1, Aug. 17, 2023
Int. Cl. G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01)
CPC G01N 23/04 (2013.01) [G01N 23/083 (2013.01); G01N 23/18 (2013.01); G01N 2223/04 (2013.01); G01N 2223/50 (2013.01); G01N 2223/646 (2013.01); G01N 2223/652 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An X-ray inspection apparatus comprising:
an X-ray source configured to irradiate an article with X-rays in a plurality of energy bands;
an X-ray detection unit capable of detecting the X-rays by a photon counting method;
an image generation unit configured to generate an overall transmission image corresponding to the X-rays in all of the plurality of energy bands and a transmission image corresponding to the X-rays in some of the plurality of energy bands on the basis of a detection result of the X-rays by the X-ray detection unit; and
an inspection unit configured to inspect the article on the basis of each of the overall transmission image and the transmission image.