US 12,222,281 B2
Method for measuring element concentration of material
Ying-Chih Wang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jul. 24, 2022, as Appl. No. 17/814,522.
Application 17/814,522 is a continuation of application No. PCT/CN2022/076326, filed on Feb. 15, 2022.
Claims priority of application No. 202111191461.8 (CN), filed on Oct. 13, 2021.
Prior Publication US 2023/0111160 A1, Apr. 13, 2023
Int. Cl. G01N 21/21 (2006.01); G01N 21/84 (2006.01)
CPC G01N 21/211 (2013.01) [G01N 21/8422 (2013.01); G01N 2021/8427 (2013.01); G01N 2021/8472 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method for measuring an element concentration of a material, comprising:
irradiating a sample to be measured and one or more reference samples respectively with first electromagnetic waves, wherein the sample to be measured is a compound containing an element to be measured, each reference sample is a mixture of at least two substances, and the at least two substances comprise a substance containing the element to be measured in the sample to be measured;
obtaining second electromagnetic waves radiated by the sample to be measured and one or more reference samples under the action of the first electromagnetic waves;
determining material property parameters of the sample to be measured and one or more reference samples by detecting the second electromagnetic waves; and
determining a reference function according to correspondences between the material property parameters of the one or more reference samples and the element concentrations of the one or more reference samples;
determining a proportionality coefficient of each substance in each reference sample according to dielectric constants of individual substances in the reference sample and a dielectric constant of the reference sample
determining an element content of the element to be measured in the compound according to the reference function, the material property parameters of the sample to be measured, and the proportionality coefficient.