US 12,222,203 B2
Fully decoupled three-axis MEMS gyroscope
Zhao Ma, Shenzhen (CN); Shitao Yan, Shenzhen (CN); Zhan Zhan, Shenzhen (CN); Xiao Kan, Shenzhen (CN); Shan Yang, Shenzhen (CN); Hongtao Peng, Shenzhen (CN); Yang Li, Shenzhen (CN); Kahkeen Lai, Singapore (SG); and Veronica Tan, Singapore (SG)
Assigned to AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, Hubei (CN)
Filed on Dec. 27, 2022, as Appl. No. 18/088,826.
Application 18/088,826 is a continuation of application No. PCT/CN2022/124697, filed on Oct. 11, 2022.
Claims priority of application No. 202211144389.8 (CN), filed on Sep. 20, 2022.
Prior Publication US 2024/0093996 A1, Mar. 21, 2024
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 10 Claims
OG exemplary drawing
 
1. A fully decoupled three-axis MEMS gyroscope, comprising:
an anchor point unit, comprising:
an anchor point subunit located at a center of a rectangle; and
four side anchor points respectively located between the central anchor point subunit and four sides of the rectangle and spaced apart from the central anchor subunit;
a driving unit coupled with a sensing unit and configured to drive the sensing unit to move, comprising:
four driving members respectively located at four sides of the rectangle, and annularly and symmetrically arranged around a center of the rectangle; one end of each driving member close to the center of the rectangle is elastically connected to the central anchor point subunit; an avoiding interval is formed between adjacent driving members, and four side anchor points are respectively located in the avoiding intervals; and
the sensing unit elastically connected to the anchor point unit, comprising:
two X mass blocks symmetrically and oppositely arranged in two of the avoiding intervals and elastically connected to two of the driving member;
two Y mass blocks symmetrically and oppositely arranged in the other two of the avoiding intervals and elastically connected to two of the driving member;
four Z mass blocks respectively located on an outer side of each driving member and elastically connected to the adjacent driving member; and
four Z detection decoupling members respectively located on an outer side of each Z mass block and elastically connected to the adjacent Z mass block;
wherein the adjacent Z detection decoupling members are elastically connected; an end of each X mass block close to the center of the rectangular and an end of each Y mass block close to the center of the rectangular are both elastically connected to the central anchor point subunit, and a central portion of each X mass block and a central portion of each Y mass block are elastically connected to a corresponding side anchor point, respectively.