US 12,222,198 B2
Optical measurement device and multiple mirror
Michael Schuth, Riol (DE); and Christopher Petry, Trier (DE)
Assigned to HOCHSCHULE TRIER, Trier (DE)
Appl. No. 17/431,327
Filed by HOCHSCHULE TRIER, Trier (DE)
PCT Filed Feb. 12, 2020, PCT No. PCT/DE2020/100094
§ 371(c)(1), (2) Date Aug. 16, 2021,
PCT Pub. No. WO2020/164667, PCT Pub. Date Aug. 20, 2020.
Claims priority of application No. 10 2019 103 814.6 (DE), filed on Feb. 14, 2019.
Prior Publication US 2022/0049952 A1, Feb. 17, 2022
Int. Cl. G01B 11/24 (2006.01); G02B 26/00 (2006.01)
CPC G01B 11/2441 (2013.01) [G02B 26/001 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A device for interferometric, optical measurement of a surface, comprising
a coherent light source emitting an electromagnetic beam;
two beam splitters;
two diaphragms each located on a flat side of one of the two beam splitters;
a multiple mirror with two distanced mirrors, comprising a first mirror to which the incoming beam hits first, and a second mirror at which the beam is reflected last, wherein the mirrors are superimposed in the direction of motion of the first wavefront and wherein the first mirror is partially transparent for the electromagnetic beam and the second mirror is fully reflective; and
whereby the beam splitters and the multiple mirror are arranged in such a manner that the electromagnetic beam hits the first beam splitter, is directed from the first beam splitter to the multiple mirror and then hits the second beam splitter;
wherein a diaphragm of the two diaphragms is arranged in the beam path between the two beam splitters in such a manner that the beam passes through the diaphragm; and
wherein a mirror of the multiple mirror is tiltable compared to the other mirror in such a manner that the mirrors enclose an angle and that a wavefront hitting the multiple mirror is divided into two outgoing wavefronts that are phase-shifted with respect to each other.