US 12,222,050 B2
Robust fluid coupling apparatus
Benjamin Andrew Sams, San Diego, CA (US); Dietmar Uwe Herbert Trees, San Diego, CA (US); Vikas Giridhar Telkar, Escondido, CA (US); Alexander Igorevich Ershov, Escondido, CA (US); Theodorus Wilhelmus Driessen, San Diego, CA (US); and Serkan Kincal, San Diego, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 18/010,312
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jul. 13, 2021, PCT No. PCT/EP2021/069426
§ 371(c)(1), (2) Date Dec. 14, 2022,
PCT Pub. No. WO2022/017866, PCT Pub. Date Jan. 27, 2022.
Claims priority of provisional application 63/054,410, filed on Jul. 21, 2020.
Claims priority of provisional application 63/167,254, filed on Mar. 29, 2021.
Claims priority of provisional application 63/216,820, filed on Jun. 30, 2021.
Prior Publication US 2023/0279974 A1, Sep. 7, 2023
Int. Cl. F16L 17/06 (2006.01); F16L 17/02 (2006.01); H05G 2/00 (2006.01)
CPC F16L 17/02 (2013.01) [H05G 2/006 (2013.01); H05G 2/008 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A target material supply apparatus comprising:
first and second fluid flow components that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus and is configured to pass the target material fluid toward the nozzle supply apparatus, each of the first and second fluid components having inner radial mating surfaces; and
a coupling apparatus configured to seal a joint between the first and second fluid flow components, the coupling apparatus comprising a gasket having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed, the gasket including outer radial mating surfaces;
wherein, when the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint at least in part at interfaces formed from interactions between inner radial mating surfaces of the first and second fluid components with respective outer radial mating surfaces of the gasket.