US 12,222,039 B2
Guided flow valve assembly and system incorporating same
Stephen Carson, Woodstock, NY (US)
Assigned to Ichor Systems, Inc.
Filed by Ichor Systems, Inc., Fremont, CA (US)
Filed on Mar. 17, 2022, as Appl. No. 17/697,038.
Claims priority of provisional application 63/164,139, filed on Mar. 22, 2021.
Prior Publication US 2022/0299118 A1, Sep. 22, 2022
Int. Cl. F16K 1/54 (2006.01); F16K 1/38 (2006.01); F16K 41/12 (2006.01); H01L 21/67 (2006.01)
CPC F16K 1/54 (2013.01) [F16K 1/38 (2013.01); F16K 41/12 (2013.01); H01L 21/67017 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A system for processing articles, the system comprising:
a fluid supply configured to supply a process fluid;
an apparatus for controlling flow, the apparatus having an inlet, an outlet, and a valve assembly, the inlet of the apparatus fluidly coupled to the fluid supply and the valve assembly fluidly coupled between the inlet and the outlet, the valve assembly comprising:
a body, the body comprising an inlet and an outlet, a flow path extending between the inlet and the outlet through a pocket within the body;
a seat having an annular ring extending from a lower surface of the seat, the seat located in the flow path and resting on a floor of the pocket, the annular ring of the seat engaging an annular groove formed in the floor of the pocket;
a closure member configured to engage the seat and obstruct the flow path, the closure member comprising a fixed portion and a movable portion connected to the fixed portion;
an actuator assembly coupled to the movable portion of the closure member to move the closure member from a closed state which obstructs the flow path to an open state which permits fluid flow;
a radial flow guide located in the flow path, a plurality of flow passages extending through the radial flow guide, the plurality of flow passages defined by the radial flow guide and the seat, the radial flow guide compressed between the seat and the fixed portion of the closure member, the fixed portion of the closure member sealing an opening of the pocket and engaging an upper surface of the radial flow guide; and
a longitudinal axis extending through the seat, the closure member, and the radial flow guide;
an outlet manifold fluidly coupled to the outlet of the apparatus; and
a processing chamber fluidly coupled to the outlet manifold.