US 12,221,695 B2
CVD system with flange assembly for facilitating uniform and laminar flow
Elad Mentovich, Tel Aviv (IL); Yaniv Rotem, Nesher (IL); Yaakov Gridish, Yoqneam Ilit (IL); Doron Naveh, Petah-Tikva (IL); Chen Stern, Kiryat Ono (IL); Yosi Ben-Naim, Eilat (IL); Ariel Ismach, Rosh Haain (IL); Eran Bar-Rabi, Shimshit (IL); and Tal Kaufman, Shimshit (IL)
Assigned to MELLANOX TECHNOLOGIES, LTD., Yokneam (IL); BAR-ILAN UNIVERSITY, Yokneam (IL); RAMOT AT TEL-AVIV UNIVERSITY LTD., Tel Aviv (IL); and SIMTAL NANO-COATINGS LTD, Shimshit (IL)
Filed by MELLANOX TECHNOLOGIES, LTD., Yokneam (IL); BAR-ILAN UNIVERSITY, Ramat Gan (IL); RAMOT AT TEL-AVIV UNIVERSITY LTD., Tel Aviv (IL); and SIMTAL NANO-COATINGS LTD, Shimshit (IL)
Filed on Jul. 1, 2021, as Appl. No. 17/305,209.
Claims priority of provisional application 63/201,910, filed on May 18, 2021.
Prior Publication US 2022/0372622 A1, Nov. 24, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 16/46 (2006.01); F15D 1/06 (2006.01)
CPC C23C 16/45504 (2013.01) [C23C 16/45591 (2013.01); C23C 16/46 (2013.01); F15D 1/06 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A flange assembly for introducing at least one gas into a chemical vapor deposition chamber, the flange assembly comprising:
a flange body disposed proximate a chemical vapor deposition process chamber, wherein the flange body defines a length and has an interior surface and an exterior surface;
a plurality of outlet tubes disposed on the interior surface of the flange body; and
a plurality of inlet tubes disposed on the exterior surface of the flange body, each inlet tube having a first end and a second end, wherein each inlet tube is in fluid communication with a corresponding outlet tube via the second end of the inlet tube, wherein the first end of each inlet tube is configured to be connected to a supply of the at least one gas,
wherein each outlet tube is configured to output the at least one gas into the chemical vapor deposition chamber for conducting a chemical vapor deposition process, and
wherein the plurality of inlet tubes extends radially outward from the exterior surface of the flange body.