US 12,221,678 B2
Powder metallurgy sputtering targets and methods of producing same
Craig M. Sungail, Chadds Ford, PA (US); Aamir Dawood Abid, Spring City, PA (US); and Stephen Krause, Phoenixville, PA (US)
Assigned to GLOBAL ADVANCED METALS USA, INC., Wellesley Hills, MA (US)
Filed by Global Advanced Metals USA, Inc., Wellesley Hills, MA (US)
Filed on Feb. 27, 2019, as Appl. No. 16/286,842.
Claims priority of provisional application 62/793,418, filed on Jan. 17, 2019.
Claims priority of provisional application 62/693,540, filed on Jul. 3, 2018.
Claims priority of provisional application 62/638,328, filed on Mar. 5, 2018.
Prior Publication US 2019/0271068 A1, Sep. 5, 2019
Int. Cl. C23C 14/34 (2006.01); B22F 1/05 (2022.01); B22F 1/052 (2022.01); B22F 1/054 (2022.01); B22F 1/065 (2022.01); B22F 1/068 (2022.01); B22F 1/142 (2022.01); B22F 1/145 (2022.01); B22F 3/24 (2006.01); B22F 9/20 (2006.01); C22C 1/04 (2023.01); C22C 28/00 (2006.01)
CPC C22C 28/00 (2013.01) [B22F 1/05 (2022.01); B22F 1/052 (2022.01); B22F 1/0553 (2022.01); B22F 1/065 (2022.01); B22F 1/068 (2022.01); B22F 1/142 (2022.01); B22F 1/145 (2022.01); B22F 3/24 (2013.01); B22F 9/20 (2013.01); C22C 1/04 (2013.01); C23C 14/3414 (2013.01); B22F 2003/248 (2013.01); B22F 2202/13 (2013.01); B22F 2304/10 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method for forming a powder metallurgy article, comprising:
consolidating a metal powder that includes a spherical metal powder into a consolidated body by a powder metallurgy technique to form a metallurgical article; and
optionally heating treating said consolidated body; wherein said spherical metal powder is i) tantalum or ii) an alloy of tantalum wherein tantalum is the predominate metal present, and said spherical metal powder has the following properties:
a. a spherical shape wherein the powder has an average aspect ratio of from 1.0 to 1.4;
b. a purity of metal of at least 99 wt % metal based on total weight of said metal powder, excluding gas impurities;
c. an average particle size of from about 0.5 micron to about 250 microns;
d. an apparent density from about 4 g/cc to about 12.6 g/cc;
e. a true density of 16.6 g/cc+−3%; and
f. a Hall flow rate of 20 sec or less.