US 12,221,357 B2
Methods and apparatus for stabilizing vanadium compounds
Charles Dezelah, Helsinki (FI); and Eric Shero, Phoenix, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Apr. 23, 2021, as Appl. No. 17/238,424.
Claims priority of provisional application 63/015,406, filed on Apr. 24, 2020.
Prior Publication US 2021/0331935 A1, Oct. 28, 2021
Int. Cl. C01G 31/04 (2006.01); C23C 14/06 (2006.01); C23C 14/54 (2006.01); C23C 16/08 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); C23C 16/54 (2006.01); C23C 18/16 (2006.01)
CPC C01G 31/04 (2013.01) [C23C 14/0694 (2013.01); C23C 14/548 (2013.01); C23C 16/08 (2013.01); C23C 16/45502 (2013.01); C23C 16/45553 (2013.01); C23C 16/52 (2013.01); C23C 16/54 (2013.01); C23C 18/1619 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of stabilizing a vanadium compound in a solution, the method comprising incorporating an effective amount of one or more stabilizing agents into said solution, wherein the one or more stabilizing agents comprise an aprotic non-aromatic heterocyclic amine.
 
8. A vessel for providing a precursor for gas-phase processing, wherein the vessel contains a vanadium compound and one or more stabilizing agents, wherein the one or more stabilizing agents comprise an aprotic non-aromatic heterocyclic amine.
 
10. A system comprising:
one or more reaction chambers;
a source comprising a composition comprising a vanadium compound and one or more stabilizing agents, wherein the one or more stabilizing agents comprise an aprotic non-aromatic heterocyclic amine; and
a controller,
wherein the controller is configured to control a flow of the composition or the vanadium compound into at least one of the one or more reaction chambers.